MOEMS

MOEMS

EnglishHardback
Motamedi, M.Edward
SPIE Press
EAN: 9780819450210
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This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
EAN 9780819450210
ISBN 0819450219
Binding Hardback
Publisher SPIE Press
Publication date January 31, 2005
Pages 676
Language English
Country United States
Authors Motamedi, M.Edward
Illustrations illustrations
Edition illustrated Edition
Series Press Monographs